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Flange seal Product List

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Isolast K-Fab flange seal

Flange seal for harsh sub-fab applications

Isolast K-Fab flange seals achieve longer seal life and improved productivity under the current harsh sub-fab conditions. With high sealing performance and a unique retention feature that facilitates attachment to NW/KF/ISO flanges, they contribute to a significant extension of preventive maintenance cycles and reduction of total cost of ownership (TCO). Specially developed unique perfluoroelastomer (FFKM) Traditionally, O-rings have been used in flange seals, but as the operating conditions become more severe, the likelihood of early failure of O-rings increases. Isolast K-Fab flange seals provide a solution to such problems. Isolast K-Fab flange seals use a specially developed perfluoroelastomer (FFKM) material designed for semiconductor applications. This material possesses excellent high-temperature and chemical resistance properties required in harsh sub-fab environments. Compared to traditional O-rings, it offers superior heat resistance and has a smaller cross-sectional area, thereby solving the problem of excessive accumulation in grooves due to thermal expansion.

  • Other semiconductor manufacturing equipment
  • Flange seal

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